Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing
In this study, the sensitivity of MEMS gas bearing’ performance to the wear in different axial and circumferential positions is investigated in detail. Rarefaction effect is introduced into the transient and steady lubrication equation, and then the finite element method (FEM) is employed...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/9/20/4409 |