Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching
The author suggests to use the etching method MacEtch (metal-assisted chemical etching) for production of micro- and nanostructures of porous silicon. The paper presents research results on the morphology structures obtained at different parameters of deposition and etching processes. The research h...
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| Format: | Article |
| Language: | English |
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Politehperiodika
2013-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
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| Online Access: | http://www.tkea.com.ua/tkea/2013/6_2013/pdf/09.zip |