Electromagnetic Micromotors—Design, Fabrication and Applications
Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated exten...
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| Format: | Article |
| Language: | English |
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MDPI AG
2014-10-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/5/4/929 |