Deposition of Lu-Fe-O thin films on silica glass substrates by MOCVD
Thin films of the Lu-Fe-O system were deposited by aerosol assisted MOCVD on silica glass substrates. Hexagonal h-LuFeO3, garnet Lu3Fe5O12, perovskite o-LuFeO3 or hematite Fe2O3 phases were obtained, depending on the thermodynamic deposition conditions or post annealing temperature. Magnetic measure...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2020/09/epjconf_cmpnc2019_05006.pdf |