Phase Retrieval Algorithm for Form Testing Metrology in Production Environment

Form testing interferometry permits a fast, non-tactile and full- field quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT- based spatial carrier phase measurement technique (S...

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Bibliographic Details
Main Authors: Stephan Stuerwald, Robert Schmitt
Format: Article
Language:English
Published: International Institute of Informatics and Cybernetics 2010-08-01
Series:Journal of Systemics, Cybernetics and Informatics
Subjects:
Online Access:http://www.iiisci.org/Journal/CV$/sci/pdfs/GO774PY.pdf
Description
Summary:Form testing interferometry permits a fast, non-tactile and full- field quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT- based spatial carrier phase measurement technique (SCPM) which requires only a single interferogram recording. The utilization of a generalized, relatively new spatial phase-shifting method operating in the position space opens up prospects for reduced phase noise and less reconstruction errors of the calculated phase-map under production conditions. Therefore this phase-shifting technique is investigated for applicability in machine integrated interferometric form testing of optical lenses. A characterization of the algorithm and a comparison with the commonly used FT-based algorithm is performed. As a reference, measurements are carried out with a coordinate measuring machine with nanometre accuracy.
ISSN:1690-4524