Phase Retrieval Algorithm for Form Testing Metrology in Production Environment
Form testing interferometry permits a fast, non-tactile and full- field quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT- based spatial carrier phase measurement technique (S...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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International Institute of Informatics and Cybernetics
2010-08-01
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| Series: | Journal of Systemics, Cybernetics and Informatics |
| Subjects: | |
| Online Access: | http://www.iiisci.org/Journal/CV$/sci/pdfs/GO774PY.pdf
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