Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the fo...

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Bibliographic Details
Main Authors: Xukai Ding, Jia Jia, Yang Gao, Hongsheng Li
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/17/10/2306