Effect of positively charged particles on sputtering damage of organic electro-luminescent diodes with Mg:Ag alloy electrodes fabricated by facing target sputtering
We investigated the influence of the positively charged particles generated during sputtering on the performances of organic light-emitting diodes (OLEDs) with Mg:Ag alloy electrodes fabricated by sputtering. The number of positively charged particles increased by several orders of magnitude when th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4981799 |