Determination of optimal crystallographic orientations for LiNbO<sub>3</sub> and LiTaO<sub>3</sub> bimorph actuators
<p>The actuators for precise positioning based on bimorph structures of piezoelectric LiNbO<span class="inline-formula"><sub>3</sub></span> and LiTaO<span class="inline-formula"><sub>3</sub></span> crystals are considered. The...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Copernicus Publications
2021-05-01
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Series: | Journal of Sensors and Sensor Systems |
Online Access: | https://jsss.copernicus.org/articles/10/121/2021/jsss-10-121-2021.pdf |