A Characterization Method of Thin Film Parameters Based on Adaptive Differential Evolution Algorithm

A Characterization Method of Thin Film Parameters Based on Adaptive Differential Evolution Algorithm

According to the transmission mode of polarized light in Mueller ellipsometry, a characterization method for the thickness and optical constants of isotropic nano films based on Self-Adaptive Differential Evolution algorithm (SADE) is proposed. By establishing the least square model of the output li...

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Bibliographic Details
Main Authors: Lihua Lei, Yuqing Guan, Yanhua Zeng, Lin Zhao, Zhangning Xie, Zhiguo Han, Chengming Cao, Yunxia Fu
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Nanotechnology
ellipsometry
algorithms
calibration
Online Access:https://ieeexplore.ieee.org/document/9459694/

Internet

https://ieeexplore.ieee.org/document/9459694/

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