Directly Writing Patterning of Conductive Material by High Voltage Induced Weak Electric Arc Machining (HV-μEAM)

Directly Writing Patterning of Conductive Material by High Voltage Induced Weak Electric Arc Machining (HV-μEAM)

An additive manufacturing (AM) method for the deposition of metallic layer in micron scale on monocrystalline silicon wafer surface by high voltage induced weak electric arc machining (HV-μEAM) has been proposed. The process characteristics of HV-μEAM are analyzed to fulfil the met...

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Bibliographic Details
Main Authors: Zilong Peng, Tianming Feng, Zilong Wei, Yong Zhang, Yinan Li
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Coatings
Subjects:
high voltage induction
arc discharge
deposition
micron scale
metallic layer
Online Access:https://www.mdpi.com/2079-6412/9/9/538

Internet

https://www.mdpi.com/2079-6412/9/9/538

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