Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing

Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing

We demonstrate fabrication of highly functional biomicrochips by hybrid femtosecond laser processing. In this process, 3D microfluidic structures are first formed inside photosensitive glass by femtosecond laser direct writing followed by thermal treatment and successive chemical wet etching. Then,...

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Bibliographic Details
Main Authors:	Sugioka Koji, Wu Dong, Midorikawa Katsumi
Format:	Article
Language:	English
Published:	EDP Sciences 2013-11-01
Series:	MATEC Web of Conferences
Online Access:	http://dx.doi.org/10.1051/matecconf/20130805005

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