Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing
We demonstrate fabrication of highly functional biomicrochips by hybrid femtosecond laser processing. In this process, 3D microfluidic structures are first formed inside photosensitive glass by femtosecond laser direct writing followed by thermal treatment and successive chemical wet etching. Then,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2013-11-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20130805005 |