Capabilities of X-ray diffuse scattering method for study of microdefects in semiconductor crystals
The capabilities of X-ray diffuse scattering (XRDS) method for the study of microdefects in semiconductor crystals have been overviewed. Analysis of the results has shown that the XRDS method is a highly sensitive and information valuable tool for studying early stages of solid sol...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Pensoft Publishers
2018-12-01
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Series: | Modern Electronic Materials |
Online Access: | https://moem.pensoft.net/article/47197/download/pdf/ |