Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

We report on a micro-hotplate technology platform optimized for the calibration of Scanning Thermal Microscopy probes (SThM) used in surface temperature measurement mode. The three chips designed include the same heating area with a calibration area of 10 × 10 µm2 where the SThM probes can land. The...

Full description

Bibliographic Details
Main Authors: Danick Briand, Tran Phong Nguyen, Etienne Lemaire, L. Thiery, P. Vairac
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
thermal calibration
calibration chip
SThM probe
micro-hotplate
thermocouple
Online Access:https://www.mdpi.com/2504-3900/1/4/334

Internet

https://www.mdpi.com/2504-3900/1/4/334

Similar Items