Direct Quantification of Heat Generation Due to Inelastic Scattering of Electrons Using a Nanocalorimeter

Direct Quantification of Heat Generation Due to Inelastic Scattering of Electrons Using a Nanocalorimeter

Abstract Transmission electron microscopy (TEM) is arguably the most important tool for atomic‐scale material characterization. A significant portion of the energy of transmitted electrons is transferred to the material under study through inelastic scattering, causing inadvertent damage via ionizat...

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Bibliographic Details
Main Authors: Joonsuk Park, Kiho Bae, Taeho Roy Kim, Christopher Perez, Aditya Sood, Mehdi Asheghi, Kenneth E. Goodson, Woosung Park
Format: Article
Language:English
Published: Wiley 2021-02-01
Series:Advanced Science
Subjects:
electron beam heating
electron energy loss spectroscopy
heat generation
inelastic scattering
transmission electron microscopy
Online Access:https://doi.org/10.1002/advs.202002876

Internet

https://doi.org/10.1002/advs.202002876

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