Dual-function pressure-temperature sensor based on silicon whiskers
The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of app...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2013-06-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2013/4_2013/pdf/05.zip |