Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing

Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing

We present the successful integration of graphene on top of AlN-based solidly mounted resonators (SMRs), using a low temperature CVD process and Ni layers as catalyst. We develop a protocol to functionalize the surface of the resonators that starts with a low damage O2 radical plasma treatment of th...

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Bibliographic Details
Main Authors: Bruno Marco, Lorena Gordillo, José Miguel Escolano, Jimena Olivares, Marta Clement, Diego Mejias, Enrique Iborra
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
gravimetric biosensor
graphene integration
surface functionalization
molecule detection
Online Access:https://www.mdpi.com/2504-3900/1/4/539

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https://www.mdpi.com/2504-3900/1/4/539

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