μ-Coriolis Mass Flow Sensor with Resistive Readout
This paper presents a <inline-formula> <math display="inline"> <semantics> <mi mathvariant="sans-serif">μ</mi> </semantics> </math> </inline-formula>-Coriolis mass flow sensor with resistive readout. Instead of measuring a...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-02-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/11/2/184 |