Phase Transformation and Superstructure Formation in (Ti<sub>0.5</sub>, Mg<sub>0.5</sub>)N Thin Films through High-Temperature Annealing
(Ti<sub>0.5</sub>, Mg<sub>0.5</sub>)N thin films were synthesized by reactive dc magnetron sputtering from elemental targets onto c-cut sapphire substrates. Characterization by θ–2θ X-ray diffraction and pole figure measurements shows a rock-salt cubic structure with (111)-or...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/11/1/89 |