Electrical characterization of single nanometer-wide Si fins in dense arrays

Electrical characterization of single nanometer-wide Si fins in dense arrays

This paper demonstrates the development of a methodology using the micro four-point probe (μ4PP) technique to electrically characterize single nanometer-wide fins arranged in dense arrays. We show that through the concept of carefully controlling the electrical contact formation process, the electri...

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Bibliographic Details
Main Authors: Steven Folkersma, Janusz Bogdanowicz, Andreas Schulze, Paola Favia, Dirch H. Petersen, Ole Hansen, Henrik H. Henrichsen, Peter F. Nielsen, Lior Shiv, Wilfried Vandervorst
Format: Article
Language:English
Published: Beilstein-Institut 2018-06-01
Series:Beilstein Journal of Nanotechnology
Subjects:
critical dimension metrology
electrical characterization
finFET
micro four-point probe
sheet resistance
Online Access:https://doi.org/10.3762/bjnano.9.178

Internet

https://doi.org/10.3762/bjnano.9.178

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