TSF-MOCVD – a novel technique for chemical vapour deposition on oxide thin films and layered heterostructures
A new principle for supplying volatile precursors to MOCVD gas-phase chemical deposition systems is proposed, based on a two-stage evaporation of an organic solution of precursors from a soaked cotton thread, which passes sequentially through the zones of evaporation of the solvent and precursors. T...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Voronezh State University
2021-09-01
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Series: | Конденсированные среды и межфазные границы |
Subjects: | |
Online Access: | https://journals.vsu.ru/kcmf/article/view/3531 |