Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring...

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Bibliographic Details
Main Authors: Han Du, Fook Siong Chau, Guangya Zhou
Format: Article
Language:English
Published: MDPI AG 2016-04-01
Series:Micromachines
Subjects:
MEMS
NEMS
photonics
plasmonics
metamaterials
optomechanics
Online Access:http://www.mdpi.com/2072-666X/7/4/69

Internet

http://www.mdpi.com/2072-666X/7/4/69

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