FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess...

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Bibliographic Details
Main Authors: Almir Talic, Samir Cerimovic, Roman Beigelbeck, Franz Kohl, Thilo Sauter, Franz Keplinger
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Sensors
Subjects:
micro-electro-mechanical systems (MEMS)
wind sensor
finite element method (FEM)
Wheatstone bridge configuration
Online Access:https://www.mdpi.com/1424-8220/19/16/3561

Internet

https://www.mdpi.com/1424-8220/19/16/3561

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