Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting
Nanoimprinting faces challenges with imprinting hard materials at low or room temperature, and with fabricating complex nanostructures rapidly. Here, the authors overcome these challenges by a room-temperature ultrasonic nanoimprinting technique that capitalizes on the concentration of ultrasonic en...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-05-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-021-23427-y |