Plastic deformation in nanostructure silicon formation
The quantity and quality analysis of plastic deformation and near-surface silicon layers with nanostructure silicon formation are given in this paper. It is shown, due to high-temperature oxidation and other factors the complex defect structure is generated in near-surface silicon layers. It consist...
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Politehperiodika
2011-04-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
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| Online Access: | http://www.tkea.com.ua/tkea/2011/1-2_2011/pdf/07.zip |
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doaj-bd632b6d983b4b028266c57b5b6e73562020-11-24T22:28:05ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182011-04-011-22224Plastic deformation in nanostructure silicon formationSmyntyna V. A.Kulinich O. A.Yatsunkiy I. R.The quantity and quality analysis of plastic deformation and near-surface silicon layers with nanostructure silicon formation are given in this paper. It is shown, due to high-temperature oxidation and other factors the complex defect structure is generated in near-surface silicon layers. It consists of a disordered silicon layer and a layer of dislocation networks. Silicon dioxide etching and additional chemical treatment allows to obtain nanostructured silicon with given properties.http://www.tkea.com.ua/tkea/2011/1-2_2011/pdf/07.zipnano-structured siliconplastic deformation |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Smyntyna V. A. Kulinich O. A. Yatsunkiy I. R. |
| spellingShingle |
Smyntyna V. A. Kulinich O. A. Yatsunkiy I. R. Plastic deformation in nanostructure silicon formation Tekhnologiya i Konstruirovanie v Elektronnoi Apparature nano-structured silicon plastic deformation |
| author_facet |
Smyntyna V. A. Kulinich O. A. Yatsunkiy I. R. |
| author_sort |
Smyntyna V. A. |
| title |
Plastic deformation in nanostructure silicon formation |
| title_short |
Plastic deformation in nanostructure silicon formation |
| title_full |
Plastic deformation in nanostructure silicon formation |
| title_fullStr |
Plastic deformation in nanostructure silicon formation |
| title_full_unstemmed |
Plastic deformation in nanostructure silicon formation |
| title_sort |
plastic deformation in nanostructure silicon formation |
| publisher |
Politehperiodika |
| series |
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| issn |
2225-5818 |
| publishDate |
2011-04-01 |
| description |
The quantity and quality analysis of plastic deformation and near-surface silicon layers with nanostructure silicon formation are given in this paper. It is shown, due to high-temperature oxidation and other factors the complex defect structure is generated in near-surface silicon layers. It consists of a disordered silicon layer and a layer of dislocation networks. Silicon dioxide etching and additional chemical treatment allows to obtain nanostructured silicon with given properties. |
| topic |
nano-structured silicon plastic deformation |
| url |
http://www.tkea.com.ua/tkea/2011/1-2_2011/pdf/07.zip |
| work_keys_str_mv |
AT smyntynava plasticdeformationinnanostructuresiliconformation AT kulinichoa plasticdeformationinnanostructuresiliconformation AT yatsunkiyir plasticdeformationinnanostructuresiliconformation |
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1725747977283174400 |