Laser target using continuous supersonic jet in vacuum

For an extreme ultraviolet (EUV) light source, Sn plasmas, which can produce a strong radiation with high conversion efficiency at 13.5 nm, attract attention. The purpose of this study is to establish technology to form and recover a tin vapor supersonic jet in vacuum and to make clear the interacti...

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Bibliographic Details
Main Authors: Ogata Yujin, Takahashi Kazumasa, Kuwabara Hajime, Nakajima Mitsuo, Horioka Kazuhiko
Format: Article
Language:English
Published: EDP Sciences 2013-11-01
Series:EPJ Web of Conferences
Online Access:http://dx.doi.org/10.1051/epjconf/20135918005