Laser target using continuous supersonic jet in vacuum
For an extreme ultraviolet (EUV) light source, Sn plasmas, which can produce a strong radiation with high conversion efficiency at 13.5 nm, attract attention. The purpose of this study is to establish technology to form and recover a tin vapor supersonic jet in vacuum and to make clear the interacti...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2013-11-01
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Series: | EPJ Web of Conferences |
Online Access: | http://dx.doi.org/10.1051/epjconf/20135918005 |