Capacitive Sensing and Electrostatic Control System Design and Analysis With a Torsion Pendulum
The micro capacitive sensing and electrostatic drive control system (front-end electronics, FEE) is the core component of inertial sensor in space gravitational wave detection. The FEE requires high-precision displacement detection, high-stability electrostatic drive, and stable system control to ac...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8943262/ |