Design Of Piezoelectric Microcantilever Chemical Sensors In COMSOL Multiphysics Area
This paper offers an analytical modeling ofthin-filmed, multi-layer piezoelectric microcantileversthat are used as MEMS sensors. These sensors arechemical kind and use piezoelectric microcantilever.These types of microcantilevers are covered withvariety of unique probe coating. The sensor has highse...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Editura Universităţii din Oradea
2009-05-01
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| Series: | Journal of Electrical and Electronics Engineering |
| Subjects: | |
| Online Access: | http://electroinf.uoradea.ro/reviste%20CSCS/documente/JEEE_2009/Articole_pdf_JEEE_EL_nr_1/JEEE_2009_Nr_1_EL_Norouzi_Design.pdf |