Helicon high-density plasma sources: physics and applications
Helicon high-density (up to ~1013 cm−3) plasma sources using a radio frequency wave in the presence of a magnetic field under a low pressure are very promising for various application fields owing to the flexibility of external operational parameters. In addition, these sources have interesting inhe...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2018-01-01
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| Series: | Advances in Physics: X |
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| Online Access: | http://dx.doi.org/10.1080/23746149.2017.1420424 |