Microstructure and Rutherford Backscattering Spectrometry of Hard/Lubricant Mo-Ti-Al-N Multilayered Coatings Prepared by Multi-Arc Ion Plating at Low Substrate Rotation

Microstructure and Rutherford Backscattering Spectrometry of Hard/Lubricant Mo-Ti-Al-N Multilayered Coatings Prepared by Multi-Arc Ion Plating at Low Substrate Rotation

To develop the hard and self-lubricating coatings applied for the industrial dry-cutting and die-casting machining tool fields, a series of MoTiAlN/MoN/Mo multilayered coatings were deposited on Si substrates under low substrate rotation by cathodic multi-arc ion plating. XRD, SEM, TEM, RBS, nanoind...

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Bibliographic Details
Main Authors: Zesong Wang, Canxin Tian, Alexander Tolstogouzov, Feng Liang, Changwei Zou, Songquan Li, Sergey I. Gusev, Muhammad Imran Yousaf, Vasiliy Pelenovich, Wenbin Zuo, Dejun Fu, Donghong Hu
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Coatings
Subjects:
multi-arc ion plating
mo-ti-al-n multilayered coatings
microstructure
modulation period
rutherford backscattering spectrometry
Online Access:https://www.mdpi.com/2079-6412/10/2/101

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https://www.mdpi.com/2079-6412/10/2/101

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