Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides
We demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This config...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-03-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.5013662 |