A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel

A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel

A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silico...

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Bibliographic Details
Main Authors: Xingwei Wang, Charles Guthy, Ye Tian, Wenhui Wang, Nan Wu, Xiaotian Zou
Format: Article
Language:English
Published: MDPI AG 2011-01-01
Series:Sensors
Subjects:
Fabry-Perot
optical fiber sensor
refractive index
MEMS
Online Access:http://www.mdpi.com/1424-8220/11/1/1078/

Internet

http://www.mdpi.com/1424-8220/11/1/1078/

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