Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE); we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaC...

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Bibliographic Details
Main Authors: Sasha Hoshian, Cristina Gaspar, Teemu Vasara, Farzin Jahangiri, Ville Jokinen, Sami Franssila
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Micromachines
Subjects:
non-lithographic
patterning
silicon
micromachining
microfluidic
Online Access:http://www.mdpi.com/2072-666X/7/12/222

Internet

http://www.mdpi.com/2072-666X/7/12/222

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