A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition

A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition

Simultaneously inducing preferred crystalline orientation with a strong piezoelectric response in polycrystalline aluminum nitride (AlN) thin films by atomic layer deposition is a technical challenge due to the upscaling of the integration of piezoelectric functionalities, such as sensing and actuat...

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Bibliographic Details
Main Authors: Tai Nguyen, Noureddine Adjeroud, Sebastjan Glinsek, Yves Fleming, Jérôme Guillot, Patrick Grysan, Jérôme Polesel-Maris
Format: Article
Language:English
Published: AIP Publishing LLC 2020-07-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0011331

Internet

http://dx.doi.org/10.1063/5.0011331

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