Influence of vacuum annealing temperature on the structure and properties of AlCrSiN/Mo self-lubricating coatings

• Main Authors: MENG De-qiang, WANG Tie-gang, PENG Yong, KE Pei-ling, ZHU Qiang, XU Ren-ren, LIU Qian
• Format: Article
• Language: zho
• Published: Journal of Materials Engineering 2021-01-01
• Series: Journal of Materials Engineering
• Subjects: self-lubricating coating; vacuum annealing temperature; high power impulse magnetron sputtering; critical load; wear rate
• Online Access: http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.001174

The AlCrSiN/Mo self-lubricating coating was prepared by hybrid technology of high power impulse magnetron sputtering and pulsed DC magnetron sputtering, and the structure and properties were modified by vacuum annealing. The influence of vacuum annealing temperature on composition, microstructure, mechanical and tribological properties of AlCrSiN/Mo coatings was systematically investigated by scanning electron microscope, X-ray diffractometer, electron probe analyzer, nano-indentation tester, scratch tester and friction and wear tester. The results show that all the AlCrSiN/Mo coatings possess the nanocomposite structure, namely the nc-(Al,Cr,Mo)N is surrounded by a-Si₃N₄ amorphous phase. After vacuum annealing, the particle size on the coating surface is increased significantly, whereas the nanohardness and critical load of the coatings are decreased correspondingly, and the wear resistance and antifriction performance are improved significantly. After being annealed at a temperature of 700 ℃, the coating presents the optimum properties with a nanohardness of 18.3 GPa, a friction coefficient of 0.51 and a wear rate of 3.4×10^-4 <i>μ</i>m³·(N·<i>μ</i>m)^-1. In this case, the characteristic values of <i>H/E</i> and <i>H</i>³/<i>E</i>^*2 keep the highest.