Influence of vacuum annealing temperature on the structure and properties of AlCrSiN/Mo self-lubricating coatings
The AlCrSiN/Mo self-lubricating coating was prepared by hybrid technology of high power impulse magnetron sputtering and pulsed DC magnetron sputtering, and the structure and properties were modified by vacuum annealing. The influence of vacuum annealing temperature on composition, microstructure, m...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Journal of Materials Engineering
2021-01-01
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| Series: | Journal of Materials Engineering |
| Subjects: | |
| Online Access: | http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2019.001174 |