A Laser-Machined Stainless-Steel Micro-Scanner for Confocal Microscopy

A stainless-steel based micro-scanner with magnetic actuation is fabricated via laser-cutting technology targeted for confocal microscopy. Laser cutting offers low-cost and high speed fabrication of such scanners. The device is designed to establish a 2D Lissajous pattern. For a coil drive of 180 mA...

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Bibliographic Details
Main Authors: H. A. Oyman, M. A. Icel, B. C. Efe, Y. D. Gokdel, O. Ferhanoglu, A. D. Yalcinkaya
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/1/4/564