Characterization of sputtered Al-B-Si thin films produced with composite targets for device applications
Sputtered films were deposited over glass and silicon (Si) substrates by using homemade centrifuged aluminum (Al) targets containing boron (B) AlB2 and AlB12 particles as their constituents. Additional films were produced with an as-received aluminum target for comparison purposes. The composite ta...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2012-06-01
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| Series: | Science and Engineering of Composite Materials |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/secm-2011-0100 |