Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure
Here, we report a facile synthesis method for the fabrication of various nanoperiod multilayers in carbon-copper films only by conveniently changing the deposition pressure from the reactive magnetron sputter process. To obtain the nano-multilayered structure with different number of layers, only on...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4980056 |