Determination of microrelief of the sample by singular beams superposition

In present paper we propose easy way to implement method of interfering vortices with opposite topological charge for the real time determination of the thickness and information about the surface of studied samples with the resolution up to 7 nanometers. The determination of the characteristics of...

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Bibliographic Details
Main Authors: Bogdan V. Sokolenko, Natalia V. Shostka, Olga S. Karakchieva, Alexander V. Volyar, Dmitrii A. Poletaev
Format: Article
Language:English
Published: Samara National Research University 2019-10-01
Series:Компьютерная оптика
Subjects:
Online Access:http://computeroptics.ru/KO/PDF/KO43-5/430505.pdf