Chemical deposition and mechanical application of semiconductors thin films
Features and main technological methods of forming thin layers of semiconductor materials by methods of chemical deposition and mechanical application are analyzed. The disadvantages of thermal sputtering and cathodic sputtering of thin films in vacuum for multicomponent semiconductor compounds are...
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| Format: | Article |
| Language: | English |
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Stepan Gzhytskyi National University of Veterinary Medicine and Biotechnologies Lviv
2021-04-01
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| Series: | Науковий вісник Львівського національного університету ветеринарної медицини та біотехнологій імені С.З. Ґжицького. Серія: Харчові технології |
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| Online Access: | https://nvlvet.com.ua/index.php/food/article/view/4130 |