Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic me...

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Bibliographic Details
Main Authors: Krüger Jan, Köning Rainer, Bodermann Bernd
Format: Article
Language:English
Published: EDP Sciences 2020-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_06010.pdf
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spelling doaj-b17c3aa5e56046e6b1079a336a4d29492021-08-02T16:51:31ZengEDP SciencesEPJ Web of Conferences2100-014X2020-01-012380601010.1051/epjconf/202023806010epjconf_eosam2020_06010Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurementsKrüger JanKöning RainerBodermann BerndIn this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_06010.pdf
collection DOAJ
language English
format Article
sources DOAJ
author Krüger Jan
Köning Rainer
Bodermann Bernd
spellingShingle Krüger Jan
Köning Rainer
Bodermann Bernd
Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
EPJ Web of Conferences
author_facet Krüger Jan
Köning Rainer
Bodermann Bernd
author_sort Krüger Jan
title Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
title_short Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
title_full Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
title_fullStr Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
title_full_unstemmed Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
title_sort characterization progress of a uv-microscope recently implemented at the ptb nanometer comparator for uni- and bidirectional measurements
publisher EDP Sciences
series EPJ Web of Conferences
issn 2100-014X
publishDate 2020-01-01
description In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.
url https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_06010.pdf
work_keys_str_mv AT krugerjan characterizationprogressofauvmicroscoperecentlyimplementedattheptbnanometercomparatorforuniandbidirectionalmeasurements
AT koningrainer characterizationprogressofauvmicroscoperecentlyimplementedattheptbnanometercomparatorforuniandbidirectionalmeasurements
AT bodermannbernd characterizationprogressofauvmicroscoperecentlyimplementedattheptbnanometercomparatorforuniandbidirectionalmeasurements
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