A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

This paper reports the design and simulation of a 4 mm2 double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores the...

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Bibliographic Details
Main Authors:	Tongqiao Miao, Dingbang Xiao, Qingsong Li, Zhanqiang Hou, Xuezhong Wu
Format:	Article
Language:	English
Published:	MDPI AG 2017-10-01
Series:	Sensors
Subjects:	double differential torsional MEMS accelerometer double-beam temperature robustness
Online Access:	https://www.mdpi.com/1424-8220/17/10/2264

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