A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration
This paper reports the design and simulation of a 4 mm2 double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores the...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-10-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/17/10/2264 |