Chemical Vapor Deposition of TaC/SiC on Graphite Tube and Its Ablation and Microstructure Studies
Tantalum carbide (TaC) and silicon carbide (SiC) layers were deposited on a graphite tube using a chemical vapor deposition process. Tantalum chloride (TaCl5) was synthesized in situ by reacting tantalum chips with chlorine at 550 °C. TaC was deposited by reacting TaCl5 with CH4 in the presence of H...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-07-01
|
| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/7/7/101 |