Grand challenge in N/MEMS
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Frontiers Media S.A.
2016-01-01
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Series: | Frontiers in Mechanical Engineering |
Subjects: | |
Online Access: | http://journal.frontiersin.org/Journal/10.3389/fmech.2015.00015/full |