Tailoring of the Structural and Optoelectronic Properties of Zinc-Tin-Oxide Thin Films via Oxygenation Process for Solar Cell Application
In this study, the impact of compositional variation in high resistance transparent (HRT) metal oxide ZTO films of thickness around 100nm has been investigated. The atomic composition in the films has been tailored by the change of RF power and sub-sequent thermal oxygenation in mixed nitrogen and o...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2020-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9229063/ |