Resonant vacuum gauge
This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Ural Research Institute of Metrology
2020-06-01
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| Series: | Standartnye Obrazcy |
| Subjects: | |
| Online Access: | https://www.rmjournal.ru/jour/article/view/234 |