Optimization of technological parameters And Verification of Electrical Characteristics OF THE 0.35 μm MOSFET
The description of the original integrated approach to solving the problem of statistical analysis in microelectronic products design process from the design of the technological routine to the system design. Testing of this methodology is described by investigating the influence of process paramete...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/496 |